JPH0140309B2 - - Google Patents
Info
- Publication number
- JPH0140309B2 JPH0140309B2 JP55058707A JP5870780A JPH0140309B2 JP H0140309 B2 JPH0140309 B2 JP H0140309B2 JP 55058707 A JP55058707 A JP 55058707A JP 5870780 A JP5870780 A JP 5870780A JP H0140309 B2 JPH0140309 B2 JP H0140309B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sample
- reflected
- lens
- pulse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002604 ultrasonography Methods 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 238000005305 interferometry Methods 0.000 description 7
- 238000007796 conventional method Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 101000860173 Myxococcus xanthus C-factor Proteins 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- -1 silicon and aluminum Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
- G01H3/10—Amplitude; Power
- G01H3/12—Amplitude; Power by electric means
- G01H3/125—Amplitude; Power by electric means for representing acoustic field distribution
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5870780A JPS56155847A (en) | 1980-05-06 | 1980-05-06 | Ultrasonic wave image pickup device |
DE8181103113T DE3162938D1 (en) | 1980-05-06 | 1981-04-24 | Acoustic microscope |
EP81103113A EP0039457B1 (en) | 1980-05-06 | 1981-04-24 | Acoustic microscope |
CA000376542A CA1167958A (en) | 1980-05-06 | 1981-04-29 | Acoustic microscope with a variable rf pulse for causing interference |
US06/261,032 US4394824A (en) | 1980-05-06 | 1981-05-06 | Acoustic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5870780A JPS56155847A (en) | 1980-05-06 | 1980-05-06 | Ultrasonic wave image pickup device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56155847A JPS56155847A (en) | 1981-12-02 |
JPH0140309B2 true JPH0140309B2 (en]) | 1989-08-28 |
Family
ID=13091967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5870780A Granted JPS56155847A (en) | 1980-05-06 | 1980-05-06 | Ultrasonic wave image pickup device |
Country Status (5)
Country | Link |
---|---|
US (1) | US4394824A (en]) |
EP (1) | EP0039457B1 (en]) |
JP (1) | JPS56155847A (en]) |
CA (1) | CA1167958A (en]) |
DE (1) | DE3162938D1 (en]) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58122456A (ja) * | 1982-01-14 | 1983-07-21 | Hitachi Ltd | 超音波顕微鏡 |
JPS59196459A (ja) * | 1983-04-22 | 1984-11-07 | Hitachi Ltd | 超音波顕微鏡 |
DE3409930A1 (de) * | 1984-03-17 | 1985-10-10 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Schaltungsanordnung zur trennung von hochfrequenzimpulsen an einer akustischen reflektionslinsenanordnung |
US4589783A (en) * | 1984-04-04 | 1986-05-20 | Wayne State University | Thermal wave imaging apparatus |
US4567767A (en) * | 1984-05-14 | 1986-02-04 | The Board Of Trustees Of The Leland Stanford Junior University | Method and apparatus for very low temperature acoustic microscopy |
US4620443A (en) * | 1984-12-13 | 1986-11-04 | The Board Of Trustees Of The Leland Stanford Junior University | Low frequency acoustic microscope |
US5627320A (en) * | 1988-03-23 | 1997-05-06 | Texas Instruments Incorporated | Apparatus and method for automated non-destructive inspection of integrated circuit packages |
US5269188A (en) * | 1991-07-29 | 1993-12-14 | Rosemount Inc. | Continuous self test time gate ultrasonic sensor and method |
US5428984A (en) * | 1993-08-30 | 1995-07-04 | Kay-Ray/Sensall, Inc. | Self test apparatus for ultrasonic sensor |
US5608165A (en) * | 1996-05-06 | 1997-03-04 | Ford Motor Company | Ultrasonic thickness gauge for multilayer plastic fuel tanks |
-
1980
- 1980-05-06 JP JP5870780A patent/JPS56155847A/ja active Granted
-
1981
- 1981-04-24 EP EP81103113A patent/EP0039457B1/en not_active Expired
- 1981-04-24 DE DE8181103113T patent/DE3162938D1/de not_active Expired
- 1981-04-29 CA CA000376542A patent/CA1167958A/en not_active Expired
- 1981-05-06 US US06/261,032 patent/US4394824A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0039457A1 (en) | 1981-11-11 |
US4394824A (en) | 1983-07-26 |
EP0039457B1 (en) | 1984-04-04 |
CA1167958A (en) | 1984-05-22 |
DE3162938D1 (en) | 1984-05-10 |
JPS56155847A (en) | 1981-12-02 |
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